Statistical Yield Modeling for Sub-wavelength Lithography

Authors

A Sreedhar
S Kundu

Publication Date

2008

Journal or Book Title

2008 IEEE INTERNATIONAL TEST CONFERENCE, VOLS 1 AND 2, PROCEEDINGS

DOI

https://doi.org/10.1109/TEST.2008.4700576

Pages

261-268

Book Series Title

INTERNATIONAL TEST CONFERENCE, PROCEEDINGS

Recommended Citation

Sreedhar, A and Kundu, S, "Statistical Yield Modeling for Sub-wavelength Lithography" (2008). 2008 IEEE INTERNATIONAL TEST CONFERENCE, VOLS 1 AND 2, PROCEEDINGS. 897.
https://doi.org/10.1109/TEST.2008.4700576