Statistical Yield Modeling for Sub-wavelength Lithography
Publication Date
2008
Journal or Book Title
2008 IEEE INTERNATIONAL TEST CONFERENCE, VOLS 1 AND 2, PROCEEDINGS
DOI
https://doi.org/10.1109/TEST.2008.4700576
Pages
261-268
Book Series Title
INTERNATIONAL TEST CONFERENCE, PROCEEDINGS
Recommended Citation
Sreedhar, A and Kundu, S, "Statistical Yield Modeling for Sub-wavelength Lithography" (2008). 2008 IEEE INTERNATIONAL TEST CONFERENCE, VOLS 1 AND 2, PROCEEDINGS. 897.
https://doi.org/10.1109/TEST.2008.4700576
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