Statistical Yield Modeling for Sub-wavelength Lithography
Journal or Book Title
2008 IEEE INTERNATIONAL TEST CONFERENCE, VOLS 1 AND 2, PROCEEDINGS
Book Series Title
INTERNATIONAL TEST CONFERENCE, PROCEEDINGS
Sreedhar, A and Kundu, S, "Statistical Yield Modeling for Sub-wavelength Lithography" (2008). Electrical and Computer Engineering Faculty Publication Series. 897.
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