Forbidden pitches in sub-wavelength lithography and their implications on design
Publication Date
2007
Journal or Book Title
JOURNAL OF COMPUTER-AIDED MATERIALS DESIGN
DOI
https://doi.org/10.1007/s10820-006-9044-7
Pages
79-89
Volume
14
Issue
1
Recommended Citation
Kundu, S; Sreedhar, A; and Sanyal, A, "Forbidden pitches in sub-wavelength lithography and their implications on design" (2007). JOURNAL OF COMPUTER-AIDED MATERIALS DESIGN. 923.
https://doi.org/10.1007/s10820-006-9044-7
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