"Formation of SiO2 Air-Gap Patterns Through scCO(2) Infusion of NIL Pat" by JR Ell, TA Crosby et al.

Polymer Science and Engineering Department Faculty Publication Series

Formation of SiO2 Air-Gap Patterns Through scCO(2) Infusion of NIL Patterned PHEMA

JR Ell
TA Crosby
JJ Peterson
KR Carter
JJ Watkins

2010

1445-1451

CHEMISTRY OF MATERIALS

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