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A Novel Process for Continuous Thermal Embossing of Large-Area Nanopatterns onto Polymer Films
Document Type: Open Access
Degree Program
Mechanical Engineering
Degree Type
Master of Science (M.S.)
Year Degree Awarded
2008
Month Degree Awarded
September
Primary Subject Category
Mechanical engineering
Secondary Subject Category
Materials science; Plastics; Polymers
Keywords
emboss, lithography, continuous, roll, nano, thermal
Advisor(s) or Committee Chair
Kim, Byung H
Abstract
As imprint lithography becomes commonplace in industrial manufacturing, the need for fast, reliable modifications to the process are of great importance. In particular, the Roll-to-Roll Nanoimprint Lithography (R2RNIL) method has been proven to yield large areas of continuous, robust patterns in the micro- and nanometer range. A thermal embossing R2RNIL system has been developed that is capable of providing a mold heating rate of 100ºC/s with sufficient temperature control to produce large-area patterns continuously at a rate in excess of four feet per minute. This process uses a novel looped-conveyor mold, allowing longer continuous patterns to be produced with superior temperature control than other methods of R2RNIL. Various patterns in the micro- and nanometer domains were replicated using this process.
Recommended Citation
Fagan, Matthew D., "A Novel Process for Continuous Thermal Embossing of Large-Area Nanopatterns onto Polymer Films" (2008). Masters Theses. Paper 200.
http://scholarworks.umass.edu/theses/200
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