Title

A STUDY OF THE OMVPE GROWTH MECHANISMS USING INTERNAL REFLECTANCE SPECTROSCOPY TO EXAMINE ADSORPTION OF TMGA AND NH3 AND SURFACE-REACTIONS BETWEEN THEM

Publication Date

1989

Journal or Book Title

JOURNAL OF ELECTRONIC MATERIALS

DOI

10.1007/BF02655343

Volume

18

Pages

45-51

Issue

1

This document is currently not available here.

Share

COinS