A STUDY OF THE OMVPE GROWTH MECHANISMS USING INTERNAL REFLECTANCE SPECTROSCOPY TO EXAMINE ADSORPTION OF TMGA AND NH3 AND SURFACE-REACTIONS BETWEEN THEM
Publication Date
1989
Journal or Book Title
JOURNAL OF ELECTRONIC MATERIALS
DOI
https://doi.org/10.1007/BF02655343
Pages
45-51
Volume
18
Issue
1
Recommended Citation
TRIPATHI, A; MAZZARESE, D; Conner, WC; and JONES, KA, "A STUDY OF THE OMVPE GROWTH MECHANISMS USING INTERNAL REFLECTANCE SPECTROSCOPY TO EXAMINE ADSORPTION OF TMGA AND NH3 AND SURFACE-REACTIONS BETWEEN THEM" (1989). JOURNAL OF ELECTRONIC MATERIALS. 146.
https://doi.org/10.1007/BF02655343
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