Kinetic Monte Carlo simulations of surface growth during plasma deposition of silicon thin films
Publication Date
2009
Journal or Book Title
JOURNAL OF CHEMICAL PHYSICS
DOI
https://doi.org/10.1063/1.3152846
Pages
-
Volume
131
Issue
3
Recommended Citation
Pandey, SC; Singh, T; and Maroudas, D, "Kinetic Monte Carlo simulations of surface growth during plasma deposition of silicon thin films" (2009). JOURNAL OF CHEMICAL PHYSICS. 315.
https://doi.org/10.1063/1.3152846
COinS