Interactions between radical growth precursors on plasma-deposited silicon thin-film surfaces
Publication Date
2007
Journal or Book Title
JOURNAL OF CHEMICAL PHYSICS
DOI
https://doi.org/10.1063/1.2672799
Pages
-
Volume
126
Issue
11
Recommended Citation
Bakos, T; Valipa, MS; and Maroudas, D, "Interactions between radical growth precursors on plasma-deposited silicon thin-film surfaces" (2007). JOURNAL OF CHEMICAL PHYSICS. 336.
https://doi.org/10.1063/1.2672799
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