Strain relaxation in Si1-xGex thin films on Si(100) substrates: Modeling and comparisons with experiments
Publication Date
2005
Journal or Book Title
Thin Films Stresses and Mechanical Properties XI
DOI
https://doi.org/10.1557/PROC-875-O4.21
Pages
157-162
Volume
875
Book Series Title
MATERIALS RESEARCH SOCIETY SYMPOSIUM PROCEEDINGS
Recommended Citation
Kolluri, K; Zepeda-Ruiz, LA; Murthy, CS; and Maroudas, D, "Strain relaxation in Si1-xGex thin films on Si(100) substrates: Modeling and comparisons with experiments" (2005). Thin Films Stresses and Mechanical Properties XI. 340.
https://doi.org/10.1557/PROC-875-O4.21
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