Interaction of SiH3 radicals with deuterated (hydrogenated) amorphous silicon surfaces
Publication Date
2005
Journal or Book Title
SURFACE SCIENCE
DOI
https://doi.org/10.1016/j.susc.2005.09.026
Pages
35-44
Volume
598
Issue
1-3
Recommended Citation
Agarwal, S; Valipa, MS; Hoex, B; van de Sanden, MCM; Maroudas, D; and Aydil, ES, "Interaction of SiH3 radicals with deuterated (hydrogenated) amorphous silicon surfaces" (2005). SURFACE SCIENCE. 352.
https://doi.org/10.1016/j.susc.2005.09.026
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