Interaction of SiH3 radicals with deuterated (hydrogenated) amorphous silicon surfaces

Authors

S Agarwal
MS Valipa
B Hoex
MCM van de Sanden
D Maroudas
ES Aydil

Publication Date

2005

Journal or Book Title

SURFACE SCIENCE

DOI

https://doi.org/10.1016/j.susc.2005.09.026

Pages

35-44

Volume

598

Issue

1-3

Recommended Citation

Agarwal, S; Valipa, MS; Hoex, B; van de Sanden, MCM; Maroudas, D; and Aydil, ES, "Interaction of SiH3 radicals with deuterated (hydrogenated) amorphous silicon surfaces" (2005). SURFACE SCIENCE. 352.
https://doi.org/10.1016/j.susc.2005.09.026