Visualizing the evolution of surface morphology and surface bond strain during plasma deposition of amorphous silicon thin films
Publication Date
2005
Journal or Book Title
IEEE TRANSACTIONS ON PLASMA SCIENCE
DOI
https://doi.org/10.1109/TPS.2005.845000
Pages
228-229
Volume
33
Issue
2
Recommended Citation
Valipa, MS; Aydil, ES; and Maroudas, D, "Visualizing the evolution of surface morphology and surface bond strain during plasma deposition of amorphous silicon thin films" (2005). IEEE TRANSACTIONS ON PLASMA SCIENCE. 359.
https://doi.org/10.1109/TPS.2005.845000
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