Visualizing the evolution of surface morphology and surface bond strain during plasma deposition of amorphous silicon thin films

Authors

MS Valipa
ES Aydil
D Maroudas

Publication Date

2005

Journal or Book Title

IEEE TRANSACTIONS ON PLASMA SCIENCE

DOI

https://doi.org/10.1109/TPS.2005.845000

Pages

228-229

Volume

33

Issue

2

Recommended Citation

Valipa, MS; Aydil, ES; and Maroudas, D, "Visualizing the evolution of surface morphology and surface bond strain during plasma deposition of amorphous silicon thin films" (2005). IEEE TRANSACTIONS ON PLASMA SCIENCE. 359.
https://doi.org/10.1109/TPS.2005.845000