First-principles analysis of precursor-surface reaction pathways relevant to plasma deposition of silicon thin films

Authors

T Bakos
D Maroudas

Publication Date

2005

Journal or Book Title

IEEE TRANSACTIONS ON PLASMA SCIENCE

DOI

https://doi.org/10.1109/TPS.2005.845002

Pages

230-231

Volume

33

Issue

2

Recommended Citation

Bakos, T and Maroudas, D, "First-principles analysis of precursor-surface reaction pathways relevant to plasma deposition of silicon thin films" (2005). IEEE TRANSACTIONS ON PLASMA SCIENCE. 360.
https://doi.org/10.1109/TPS.2005.845002