Title
First-principles analysis of precursor-surface reaction pathways relevant to plasma deposition of silicon thin films
Publication Date
2005
Journal or Book Title
IEEE TRANSACTIONS ON PLASMA SCIENCE
Volume
33
Pages
230-231
Issue
2
Recommended Citation
Bakos, T and Maroudas, D, "First-principles analysis of precursor-surface reaction pathways relevant to plasma deposition of silicon thin films" (2005). IEEE TRANSACTIONS ON PLASMA SCIENCE. 360.
Retrieved from https://scholarworks.umass.edu/che_faculty_pubs/360
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