Hydrogen in Si-Si bond center and platelet-like defect configurations in amorphous hydrogenated silicon

Authors

S Agarwal
B Hoex
MCM van de Sanden
D Maroudas
ES Aydil

Publication Date

2004

Journal or Book Title

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B

DOI

https://doi.org/10.1116/1.1824191

Pages

2719-2726

Volume

22

Issue

6

Recommended Citation

Agarwal, S; Hoex, B; van de Sanden, MCM; Maroudas, D; and Aydil, ES, "Hydrogen in Si-Si bond center and platelet-like defect configurations in amorphous hydrogenated silicon" (2004). JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B. 364.
https://doi.org/10.1116/1.1824191