Title
Measurement of absolute radical densities in a plasma using modulated-beam line-of-sight threshold ionization mass spectrometry
Publication Date
2004
Journal or Book Title
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
DOI
https://doi.org/10.1116/1.1627767
Pages
71-81
Volume
22
Issue
1
Recommended Citation
Agarwal, S; Quax, GWW; van de Sanden, MCM; Maroudas, D; and Aydil, ES, "Measurement of absolute radical densities in a plasma using modulated-beam line-of-sight threshold ionization mass spectrometry" (2004). JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A. 369.
https://doi.org/10.1116/1.1627767
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