Measurement of absolute radical densities in a plasma using modulated-beam line-of-sight threshold ionization mass spectrometry

Authors

S Agarwal
GWW Quax
MCM van de Sanden
D Maroudas
ES Aydil

Publication Date

2004

Journal or Book Title

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

DOI

https://doi.org/10.1116/1.1627767

Pages

71-81

Volume

22

Issue

1

Recommended Citation

Agarwal, S; Quax, GWW; van de Sanden, MCM; Maroudas, D; and Aydil, ES, "Measurement of absolute radical densities in a plasma using modulated-beam line-of-sight threshold ionization mass spectrometry" (2004). JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A. 369.
https://doi.org/10.1116/1.1627767