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College of Engineering
Chemical Engineering
Chemical Engineering Faculty Publication Series
Measurement of absolute radical densities in a plasma using modulated-beam line-of-sight threshold ionization mass spectrometry
Publication
Measurement of absolute radical densities in a plasma using modulated-beam line-of-sight threshold ionization mass spectrometry
Agarwal, S
;
Quax, GWW
;
van de Sanden, MCM
;
Maroudas, D
;
Aydil, ES
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article
article
Date
2004-01-01
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URI
https://hdl.handle.net/20.500.14394/5773
DOI
https://doi.org/10.1116/1.1627767
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