Kinetics of the ruthenium thin film deposition from supercritical carbon dioxide by the hydrogen reduction of Ru(tmhd)(2)cod

Authors

CF Karanikas
JJ Watkins

Publication Date

2010

Journal or Book Title

MICROELECTRONIC ENGINEERING

Pages

566-572

Volume

87

Issue

4

Recommended Citation

Karanikas, CF and Watkins, JJ, "Kinetics of the ruthenium thin film deposition from supercritical carbon dioxide by the hydrogen reduction of Ru(tmhd)(2)cod" (2010). MICROELECTRONIC ENGINEERING. 1070.
Retrieved from https://scholarworks.umass.edu/pse_faculty_pubs/1070