Title
Kinetics of the ruthenium thin film deposition from supercritical carbon dioxide by the hydrogen reduction of Ru(tmhd)(2)cod
Publication Date
2010
Journal or Book Title
MICROELECTRONIC ENGINEERING
Pages
566-572
Volume
87
Issue
4
Recommended Citation
Karanikas, CF and Watkins, JJ, "Kinetics of the ruthenium thin film deposition from supercritical carbon dioxide by the hydrogen reduction of Ru(tmhd)(2)cod" (2010). MICROELECTRONIC ENGINEERING. 1070.
Retrieved from https://scholarworks.umass.edu/pse_faculty_pubs/1070
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