Supercritical Fluids for the Fabrication of Semiconductor Devices: Emerging or Missed Opportunities?

Authors

AH Romang
JJ Watkins

Publication Date

2010

Journal or Book Title

CHEMICAL REVIEWS

Pages

459-478

Volume

110

Issue

1

Recommended Citation

Romang, AH and Watkins, JJ, "Supercritical Fluids for the Fabrication of Semiconductor Devices: Emerging or Missed Opportunities?" (2010). CHEMICAL REVIEWS. 1072.
Retrieved from https://scholarworks.umass.edu/pse_faculty_pubs/1072