Conformal deposition of metal oxide films in supercritical carbon dioxide
Publication Date
2007
Journal or Book Title
Advanced Metallization Conference 2006 (AMC 2006)
Pages
233-238
Recommended Citation
O'Neil, A and Watkins, JJ, "Conformal deposition of metal oxide films in supercritical carbon dioxide" (2007). Advanced Metallization Conference 2006 (AMC 2006). 1083.
Retrieved from https://scholarworks.umass.edu/pse_faculty_pubs/1083
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