Reactive deposition of conformal metal oxide films from supercritical carbon dioxide
Publication Date
2007
Journal or Book Title
CHEMISTRY OF MATERIALS
Pages
5460-5466
Volume
19
Issue
23
Recommended Citation
O'Neil, A and Watkins, JJ, "Reactive deposition of conformal metal oxide films from supercritical carbon dioxide" (2007). CHEMISTRY OF MATERIALS. 1085.
Retrieved from https://scholarworks.umass.edu/pse_faculty_pubs/1085
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