Reactive deposition of conformal ruthenium films from supercritical carbon dioxide
Publication Date
2006
Journal or Book Title
CHEMISTRY OF MATERIALS
Pages
5652-5658
Volume
18
Issue
24
Recommended Citation
O'Neil, A and Watkins, JJ, "Reactive deposition of conformal ruthenium films from supercritical carbon dioxide" (2006). CHEMISTRY OF MATERIALS. 1088.
Retrieved from https://scholarworks.umass.edu/pse_faculty_pubs/1088
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