Reactive deposition of conformal ruthenium films from supercritical carbon dioxide

Authors

A O'Neil
JJ Watkins

Publication Date

2006

Journal or Book Title

CHEMISTRY OF MATERIALS

Pages

5652-5658

Volume

18

Issue

24

Recommended Citation

O'Neil, A and Watkins, JJ, "Reactive deposition of conformal ruthenium films from supercritical carbon dioxide" (2006). CHEMISTRY OF MATERIALS. 1088.
Retrieved from https://scholarworks.umass.edu/pse_faculty_pubs/1088