Fabrication of sub-45nm structures for the next generation of devices: A lot of effort for a little device

Authors

JJ Watkins
DJ Bishop

Publication Date

2005

Journal or Book Title

MRS BULLETIN

Pages

937-939

Volume

30

Issue

12

Recommended Citation

Watkins, JJ and Bishop, DJ, "Fabrication of sub-45nm structures for the next generation of devices: A lot of effort for a little device" (2005). MRS BULLETIN. 1093.
Retrieved from https://scholarworks.umass.edu/pse_faculty_pubs/1093