Sacrificial adhesion promotion layer for Cu deposition in supercritical carbon dioxide

Authors

YF Zong
XY Shan
JJ Watkins

Publication Date

2004

Journal or Book Title

ADVANCED METALLIZATION CONFERENCE 2004 (AMC 2004)

Pages

633-637

Recommended Citation

Zong, YF; Shan, XY; and Watkins, JJ, "Sacrificial adhesion promotion layer for Cu deposition in supercritical carbon dioxide" (2004). ADVANCED METALLIZATION CONFERENCE 2004 (AMC 2004). 1096.
Retrieved from https://scholarworks.umass.edu/pse_faculty_pubs/1096