Sacrificial adhesion promotion layer for Cu deposition in supercritical carbon dioxide
Publication Date
2004
Journal or Book Title
ADVANCED METALLIZATION CONFERENCE 2004 (AMC 2004)
Pages
633-637
Recommended Citation
Zong, YF; Shan, XY; and Watkins, JJ, "Sacrificial adhesion promotion layer for Cu deposition in supercritical carbon dioxide" (2004). ADVANCED METALLIZATION CONFERENCE 2004 (AMC 2004). 1096.
Retrieved from https://scholarworks.umass.edu/pse_faculty_pubs/1096
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