Formation of SiO2 Air-Gap Patterns Through scCO(2) Infusion of NIL Patterned PHEMA

Authors

JR Ell
TA Crosby
JJ Peterson
KR Carter
JJ Watkins

Publication Date

2010

Journal or Book Title

CHEMISTRY OF MATERIALS

Pages

1445-1451

Volume

22

Issue

4

Recommended Citation

Ell, JR; Crosby, TA; Peterson, JJ; Carter, KR; and Watkins, JJ, "Formation of SiO2 Air-Gap Patterns Through scCO(2) Infusion of NIL Patterned PHEMA" (2010). CHEMISTRY OF MATERIALS. 11.
Retrieved from https://scholarworks.umass.edu/pse_faculty_pubs/11