Deposition of Cu films from supercritical fluids using Cu(I) beta-diketonate precursors

Authors

A Cabanas
JM Blackburn
JJ Watkins

Publication Date

2002

Journal or Book Title

MICROELECTRONIC ENGINEERING

Pages

53-61

Volume

64

Issue

1-4

Recommended Citation

Cabanas, A; Blackburn, JM; and Watkins, JJ, "Deposition of Cu films from supercritical fluids using Cu(I) beta-diketonate precursors" (2002). MICROELECTRONIC ENGINEERING. 1117.
Retrieved from https://scholarworks.umass.edu/pse_faculty_pubs/1117