Deposition of device-quality conformal copper films from supercritical carbon dioxide.
Publication Date
2002
Journal or Book Title
ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY
Pages
U663-U664
Volume
223
Recommended Citation
Blackburn, JM; Cabanas, A; Long, DP; and Watkins, JJ, "Deposition of device-quality conformal copper films from supercritical carbon dioxide." (2002). ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY. 1118.
Retrieved from https://scholarworks.umass.edu/pse_faculty_pubs/1118
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