Silylcarborane Acrylate Nanoimprint Lithography Resists
Publication Date
2009
Journal or Book Title
ACS APPLIED MATERIALS & INTERFACES
Pages
1887-1892
Volume
1
Issue
9
Recommended Citation
Simon, YC; Moran, IW; Carter, KR; and Coughlin, EB, "Silylcarborane Acrylate Nanoimprint Lithography Resists" (2009). ACS APPLIED MATERIALS & INTERFACES. 17.
Retrieved from https://scholarworks.umass.edu/pse_faculty_pubs/17
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