High-resolution soft lithography of thin film resists enabling nanoscopic pattern transfer

Authors

IW Moran
DF Cheng
SB Jhaveri
KR Carter

Publication Date

2008

Journal or Book Title

SOFT MATTER

Pages

168-176

Volume

4

Issue

1

Recommended Citation

Moran, IW; Cheng, DF; Jhaveri, SB; and Carter, KR, "High-resolution soft lithography of thin film resists enabling nanoscopic pattern transfer" (2008). SOFT MATTER. 27.
Retrieved from https://scholarworks.umass.edu/pse_faculty_pubs/27