High-resolution soft lithography of thin film resists enabling nanoscopic pattern transfer
Publication Date
2008
Journal or Book Title
SOFT MATTER
Pages
168-176
Volume
4
Issue
1
Recommended Citation
Moran, IW; Cheng, DF; Jhaveri, SB; and Carter, KR, "High-resolution soft lithography of thin film resists enabling nanoscopic pattern transfer" (2008). SOFT MATTER. 27.
Retrieved from https://scholarworks.umass.edu/pse_faculty_pubs/27
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