Directly patterned mesoporous dielectric films templated from chemically amplified block copolymers
Publication Date
2008
Journal or Book Title
ADVANCED METALLIZATION CONFERENCE 2007 (AMC 2007)
Pages
495-499
Volume
23
Book Series Title
MATERIALS RESEARCH SOCIETY CONFERENCE PROCEEDINGS
Recommended Citation
Nagarajan, S; Bosworth, JK; Ober, CK; Russell, TP; and Watkins, JJ, "Directly patterned mesoporous dielectric films templated from chemically amplified block copolymers" (2008). ADVANCED METALLIZATION CONFERENCE 2007 (AMC 2007). 896.
Retrieved from https://scholarworks.umass.edu/pse_faculty_pubs/896
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