Ordered arrays of < 100 >-oriented silicon nanorods by CMOS-compatible block copolymer lithography
Publication Date
2007
Journal or Book Title
NANO LETTERS
Pages
1516-1520
Volume
7
Issue
6
Recommended Citation
Zschech, D; Kim, DH; Milenin, AP; Scholz, R; Hillebrand, R; Hawker, CJ; Russell, TP; Steinhart, M; and Gosele, U, "Ordered arrays of < 100 >-oriented silicon nanorods by CMOS-compatible block copolymer lithography" (2007). NANO LETTERS. 926.
Retrieved from https://scholarworks.umass.edu/pse_faculty_pubs/926
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