Ordered arrays of < 100 >-oriented silicon nanorods by CMOS-compatible block copolymer lithography

Authors

D Zschech
DH Kim
AP Milenin
R Scholz
R Hillebrand
CJ Hawker
TP Russell
M Steinhart
U Gosele

Publication Date

2007

Journal or Book Title

NANO LETTERS

Pages

1516-1520

Volume

7

Issue

6

Recommended Citation

Zschech, D; Kim, DH; Milenin, AP; Scholz, R; Hillebrand, R; Hawker, CJ; Russell, TP; Steinhart, M; and Gosele, U, "Ordered arrays of < 100 >-oriented silicon nanorods by CMOS-compatible block copolymer lithography" (2007). NANO LETTERS. 926.
Retrieved from https://scholarworks.umass.edu/pse_faculty_pubs/926