Kinetics of the ruthenium thin film deposition from supercritical carbon dioxide by the hydrogen reduction of Ru(tmhd)(2)cod

Karanikas, CFWatkins, JJ2024-04-262024-04-262010-01-01https://hdl.handle.net/20.500.14394/41337Kinetics, Thin film, Ruthenium, Supercritical fluid deposition,Kinetics of the ruthenium thin film deposition from supercritical carbon dioxide by the hydrogen reduction of Ru(tmhd)(2)codarticle