Formation of SiO2 Air-Gap Patterns Through scCO(2) Infusion of NIL Patterned PHEMA

Ell, JRCrosby, TAPeterson, JJCarter, KRWatkins, JJ2024-04-262024-04-262010-01-01https://hdl.handle.net/20.500.14394/41362Formation of SiO2 Air-Gap Patterns Through scCO(2) Infusion of NIL Patterned PHEMAarticle