Contact mechanics of a flexible imprinter for photocured nanoimprint lithography

McClelland, GMRettner, CTHart, MWCarter, KRSanchez, MIBest, METerris, BD2024-04-262024-04-262005-01-01https://hdl.handle.net/20.500.14394/41779imprint, nanoimprint, lithography, contact mechanics,Contact mechanics of a flexible imprinter for photocured nanoimprint lithographyarticle