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Access Type

Open Access

Degree Program

Polymer Science & Engineering

Degree Name

Thesis (M.S.)

Year Degree Awarded

1982

Keywords

Lithography, Electron beam, Polymers

Abstract

Multiple thin films which are conducting, insulating and semiconducting are important components of integrated circuit technology. Circuits are fabricated from these layers by patterning the films to form isolated circuit elements which are themselves interconnected by patterned films (1).

DOI

https://doi.org/10.7275/M4AR-N020

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