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Access Type
Open Access
Document Type
thesis
Degree Program
Polymer Science & Engineering
Degree Name
Thesis (M.S.)
Year Degree Awarded
1982
Keywords
Lithography, Electron beam, Polymers
Abstract
Multiple thin films which are conducting, insulating and semiconducting are important components of integrated circuit technology. Circuits are fabricated from these layers by patterning the films to form isolated circuit elements which are themselves interconnected by patterned films (1).
DOI
https://doi.org/10.7275/M4AR-N020