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ORCID
https://orcid.org/0000-0002-0292-304X
Access Type
Open Access Thesis
Document Type
thesis
Degree Program
Electrical & Computer Engineering
Degree Type
Master of Science in Electrical and Computer Engineering (M.S.E.C.E.)
Year Degree Awarded
2021
Month Degree Awarded
September
Abstract
Metasurfaces are arrays of subwavelength meta-atoms that shape waves in a compact and planar form factor. During recent years, metasurfaces have gained a lot of attention due to their compact form factor, easy integration with other devices, multi functionality and straightforward fabrication using conventional CMOS techniques. To provide and evaluate an efficient metasurface, an optimized design, high resolution fabrication and accurate measurement is required. Analysis and design of metasurfaces require accurate methods for modeling their interactions with waves. Conventional modeling techniques assume that metasurfaces are locally periodic structures excited by plane waves, restricting their applicability to gradually varying metasurfaces that are illuminated with plane waves. In this work, we will first provide a novel technique that enables the development of accurate and general models for 1D metasurfaces. This approach can be easily extended to 2D metasurfaces. Due to the remarkable importance of accurate characterization of metasurfaces, we will provide a rigorous method to characterize 1D metasurfaces. Finally, we will provide an accurate approach to fabricate and characterize 2D metasrufaces.
DOI
https://doi.org/10.7275/24590103.0
First Advisor
Amir Arbabi
Creative Commons License
This work is licensed under a Creative Commons Attribution 4.0 License.
Recommended Citation
Torfeh, Mahsa, "Modeling and Characterization of Optical Metasurfaces" (2021). Masters Theses. 1141.
https://doi.org/10.7275/24590103.0
https://scholarworks.umass.edu/masters_theses_2/1141
Included in
Electromagnetics and Photonics Commons, Electronic Devices and Semiconductor Manufacturing Commons, Nanotechnology Fabrication Commons, Optics Commons