Publication

Thermally activated mechanisms of hydrogen abstraction by growth precursors during plasma deposition of silicon thin films

Citations
Altmetric:
Abstract
Type
article
Date
2005
Publisher
Degree
Advisors
License
License
Research Projects
Organizational Units
Journal Issue
Embargo Lift Date
URI
https://hdl.handle.net/20.500.14394/5765
DOI
10.1063/1.1839556
Publisher Version
Embedded videos
Collections
Chemical Engineering Faculty Publication Series
Show all metadata