Rapid hot embossing of polymer microfeatures

Authors

TE Kimerling
WD Liu
BH Kim
DG Yao

Publication Date

2006

Journal or Book Title

MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS

Pages

730-735

Volume

12

Issue

8

Recommended Citation

Kimerling, TE; Liu, WD; Kim, BH; and Yao, DG, "Rapid hot embossing of polymer microfeatures" (2006). MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS. 428.
Retrieved from https://scholarworks.umass.edu/mie_faculty_pubs/428