Fabrication of device nanostructures using supercritical fluids
Publication Date
2005
Journal or Book Title
MRS BULLETIN
Pages
967-975
Volume
30
Issue
12
Recommended Citation
O'Neil, A and Watkins, JJ, "Fabrication of device nanostructures using supercritical fluids" (2005). MRS BULLETIN. 1094.
Retrieved from https://scholarworks.umass.edu/pse_faculty_pubs/1094
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