Title
Formation of SiO2 Air-Gap Patterns Through scCO(2) Infusion of NIL Patterned PHEMA
Publication Date
2010
Journal or Book Title
CHEMISTRY OF MATERIALS
Pages
1445-1451
Volume
22
Issue
4
Recommended Citation
Ell, JR; Crosby, TA; Peterson, JJ; Carter, KR; and Watkins, JJ, "Formation of SiO2 Air-Gap Patterns Through scCO(2) Infusion of NIL Patterned PHEMA" (2010). CHEMISTRY OF MATERIALS. 11.
Retrieved from https://scholarworks.umass.edu/pse_faculty_pubs/11
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