Reactive deposition of device quality conformal copper films from supercritical CO2

Authors

JM Blackburn
A Cabanas
Y Zong
JD Quinn
JJ Watkins

Publication Date

2001

Journal or Book Title

ADVANCED METALLIZATION CONFERENCE 2001 (AMC 2001)

Pages

177-183

Book Series Title

MATERIALS RESEARCH SOCIETY CONFERENCE PROCEEDINGS

Recommended Citation

Blackburn, JM; Cabanas, A; Zong, Y; Quinn, JD; and Watkins, JJ, "Reactive deposition of device quality conformal copper films from supercritical CO2" (2001). ADVANCED METALLIZATION CONFERENCE 2001 (AMC 2001). 1116.
Retrieved from https://scholarworks.umass.edu/pse_faculty_pubs/1116