Deposition of conformal copper and nickel films from supercritical carbon dioxide

Authors

JM Blackburn
DP Long
A Cabanas
JJ Watkins

Publication Date

2001

Journal or Book Title

SCIENCE

Pages

141-145

Volume

294

Issue

5540

Recommended Citation

Blackburn, JM; Long, DP; Cabanas, A; and Watkins, JJ, "Deposition of conformal copper and nickel films from supercritical carbon dioxide" (2001). SCIENCE. 1122.
Retrieved from https://scholarworks.umass.edu/pse_faculty_pubs/1122