Cyclophosphazene-containing polymers as imprint lithography resists

Authors

EC Hagberg
MW Hart
LH Cong
CW Allen
KR Carter

Publication Date

2007

Journal or Book Title

JOURNAL OF INORGANIC AND ORGANOMETALLIC POLYMERS AND MATERIALS

Pages

377-385

Volume

17

Issue

2

Recommended Citation

Hagberg, EC; Hart, MW; Cong, LH; Allen, CW; and Carter, KR, "Cyclophosphazene-containing polymers as imprint lithography resists" (2007). JOURNAL OF INORGANIC AND ORGANOMETALLIC POLYMERS AND MATERIALS. 31.
Retrieved from https://scholarworks.umass.edu/pse_faculty_pubs/31