Contact mechanics of a flexible imprinter for photocured nanoimprint lithography

Authors

GM McClelland
CT Rettner
MW Hart
KR Carter
MI Sanchez
ME Best
BD Terris

Publication Date

2005

Journal or Book Title

TRIBOLOGY LETTERS

Pages

59-63

Volume

19

Issue

1

Recommended Citation

McClelland, GM; Rettner, CT; Hart, MW; Carter, KR; Sanchez, MI; Best, ME; and Terris, BD, "Contact mechanics of a flexible imprinter for photocured nanoimprint lithography" (2005). TRIBOLOGY LETTERS. 46.
Retrieved from https://scholarworks.umass.edu/pse_faculty_pubs/46